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VACSCO Co., Ltd.
[Korea]
Address:
102-15 Namioecheon 1-gil, Nami-myeon, Seowon-gu, Cheongju-si, Chungcheongbuk-do 362-813 Korea
Phone:
82-10-25611053
Contact name:
Nanhee Ryu , Manager



VACSCO Co., Ltd.

VACSCO Co., Ltd.

 

MFC (Mass Flow Controller )

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MFC (Mass Flow Controller )

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 Origin

Korea

 Model Number

Mass Flow Controller


MFC
 

mfc.jpg

 

Applications


Specifications
- Total Industry
- Precision Gas Blending & Analyzing
- Gas Injection on Surface treatment Indusry (PVD, CVD, Reactor, etc)
- Semiconductor Indusry
- Component Leak Detection
- Research and Development
- High ressure Industry
- Optical Fiber
- Fuel Cell
- Reactor System
- Gas mixing System
- Laboratory

 

Specifications

 

Moadel M2030VA M3030VA M2100VA M3100VA
Range (N2) 5sccm ~ 30slpm 30 ~ 100slpm
ResponseTime ≤3 sec ≤3 sec
Accuracy ±1% FS ±1% FS
Repeatability ±0.25% FS ±0.25% FS
In / out signal 0~5Vdc 0~5Vdc or
4~20mA
0~5Vdc 0~5Vdc or
4~20mA
Supply Power ±15Vdc, 350mA a±15Vdc, 350mA
Max operating pressure ≤90 bar a≤90 bar
Max operating Temp 0~50℃ 0~50℃
Leak rate 1x10-9 atm?cc/sec 1x10-9 atm?cc/sec
Control Range 5~100% for max range 5~100% for max range


Related Keywords: MFC , Mass flow controller


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