Applications
Specifications
- Total Industry
- Precision Gas Blending & Analyzing
- Gas Injection on Surface treatment Indusry (PVD, CVD, Reactor, etc)
- Semiconductor Indusry
- Component Leak Detection
- Research and Development
- High ressure Industry
- Optical Fiber
- Fuel Cell
- Reactor System
- Gas mixing System
- Laboratory
Specifications
Moadel |
M2030VA |
M3030VA |
M2100VA |
M3100VA |
Range (N2) |
5sccm ~ 30slpm |
30 ~ 100slpm |
ResponseTime |
≤3 sec |
≤3 sec |
Accuracy |
±1% FS |
±1% FS |
Repeatability |
±0.25% FS |
±0.25% FS |
In / out signal |
0~5Vdc |
0~5Vdc or
4~20mA |
0~5Vdc |
0~5Vdc or
4~20mA |
Supply Power |
±15Vdc, 350mA |
a±15Vdc, 350mA |
Max operating pressure |
≤90 bar |
a≤90 bar |
Max operating Temp |
0~50℃ |
0~50℃ |
Leak rate |
1x10-9 atm?cc/sec |
1x10-9 atm?cc/sec |
Control Range |
5~100% for max range |
5~100% for max range |